Resumo

MORENO MONTOYA, LUIS  e  ARANGO, PEDRO JOSÉ. STRUCTURAL AND MORPHOLOGICAL CHARACTERIZATION OF ZnO FILMS DEPOSITED ON GLASS SUPPORTS. Dyna rev.fac.nac.minas [online]. 2007, vol.74, n.151, pp.37-45. ISSN 0012-7353.

Using the PAPVD (Plasma Assisted Physical Vapor Deposition) technique by pulsed arc, were grown films of ZnO on glasses substrates. The films were grown by varying the voltage of the discharge, the pressure of the gas and the number of discharges. The structural properties, such as crystallinity, microstructure, and surface roughness of ZnO films, were investigated using X Ray Diffraction (XRD), Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). It was found that the material deposited is effectivitly ZnO, with a hexagonal crystalline structure, with a preferential orientation in planes (002), high crystallographic texture, parameters of net average of a0=3,250495 Å and c0=5,21608 Å, thickness of the films finding values in the order of hundred of nanometers, size of grain average of 0,529 mm, and roughness average of 98,6 Å. Also it was detected the presence of irregularities, cracks and micro-droplets in the surface of the films.

Palavras-chave : Zinc oxide; Crystallinity; Microstructure; Roughness.

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