Abstract

DUARTE, JULIO; FERNANDEZ, FLAVIO  and  MORENO SERENO, MAURICIO. MEASURING TECHNIQUES FOR MANOEUVRES. Dyna rev.fac.nac.minas [online]. 2009, vol.76, n.158, pp. 167-176. ISSN 0012-7353.

The characterization of devices that have as a physical principle the modifications of their geometrical structures such as the silicon membrane deflection demands that their deformations must be measured in a reliable and precise way. In this sense, a study of some sensor characterization techniques used today is done. Optical techniques are emphasized, mainly the interferometric technique, which was used to characterize silicon membranes, that were manufactured in the Microelectronics National Centre at Universidad Auntónoma de Barcelona and tested at the Electronics Department at Barcelona University.

Keywords : Membrane; pneumatic; interferometer; infrared; piezoresistive.