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DYNA

versão impressa ISSN 0012-7353

Resumo

RESTREPO PARRA, ELISABETH et al. ON THE APPLICATION OF DIGITAL SIGNAL FOR STUDYING OPTICAL EMISSION SPECTROSCOPY . Dyna rev.fac.nac.minas [online]. 2009, vol.76, n.159, pp.205-215. ISSN 0012-7353.

In this work, an automatic extraction of characteristics from spectra taken during coatings production by plasma assisted techniques is proposed. The optical spectra also depend on these external parameters. The first step consists on carried out a filtering and smoothing of the signal, in order to eliminate the noise and non important information. The second step refers to determine automatically the wavelength of peaks. Then, the identification of chemical elements for each peak was done from a specialized data bases. After that, the software allows to determine peak characteristics such as intensity, FWHM (Full With at Half Maximum), continuous and the line profile. These parameters were employed together with spectroscopic methods such as Boltzmann plot, different ionization degree line to line ratio and line to continuous ratio in order to determine Texc= 4778.32 K, ne=2.54 1017 cm-3 y Te= 2668 K respectively. These values are similar to those reported in the literature, for this kind of plasmas. The principal advantage of this software was the possibility to analyze the plasma in very short time (in order of seconds), while the manual process can take several days.

Palavras-chave : Optical emission spectroscopy; thin films; plasma; automatic extraction of characteristics.

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