Resumo

COLORADO, H. A.; SALVA, H. R.  e  GHILARDUCCI, A. A.. RESIDUAL ELASTIC STRAIN OF AISI 304 STAINLESS STEEL SHEETS COVERED WITH A TITANIUM NITRIDE THIN FILM DEPOSITED BY PVD-MAGNETRON SPUTTERING. Dyna rev.fac.nac.minas [online]. 2009, vol.76, n.160, pp.207-215. ISSN 0012-7353.

X Ray Diffraction characterization was carried out on AISI 304stainless steel sheets covered with a 3mm thick titanium nitride film. The deposition technique used was PVD-Magnetron Sputtering at 200 ˚C. The resulting microstructures of the substrate, the film and the interface were studied by Optical Microscopy (OM), Scanning Electron (SEM) and Atomic Force (AFM) Microscopes. Residual elastic strain associated with the X- ray diffraction (XRD) broadening peaks was also determined.

Palavras-chave : AISI 304 stainless steel; thin solid films; TiN; residual elastic strain; XRD.

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