Resumo

DUARTE, JULIO ENRIQUE; FERNANDEZ MORALES, FLAVIO HUMBERTO  e  BADOSA, ESTELA MARTIN. DESIGN AND CHARACTERIZATION OF THERMALLY ACTUATED BIMETALLIC MEMBRANES BY MICHELSON INTERFEROMETRY. Dyna rev.fac.nac.minas [online]. 2011, vol.78, n.166, pp.75-80. ISSN 0012-7353.

This paper presents the design and characterization of thermally actuated Al-Si bimetallic membranes. The design was made with the Finite Element Method and was emphasized on optimizing the thickness ratio between the aluminum and silicon layers. The membrane deflection was measured employing the Michelson Interferometer. The experimental process was carried out with square membranes of 5 mm of side length, 10mm in silicon thickness, and an aluminum thicknesses of 4 and 1mm. A maximum deflection of 14mm was obtained for membranes with 4mm of aluminum thickness, which is consistent with predictions made by numerical calculations.

Palavras-chave : Bietallic effect; micromembranes; interferometry; Finite Element Method.

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