SciELO - Scientific Electronic Library Online

 
vol.85 número205Development of an information system for teleoperated physical rehab care service via Internet. Pilot case: patients with mild knee injury who live in geographically vulnerable zonesMitigation potential of active transport projects: trip attraction and CO2 avoidance indicators in colombian cities índice de autoresíndice de assuntospesquisa de artigos
Home Pagelista alfabética de periódicos  

Serviços Personalizados

Artigo

Indicadores

Links relacionados

  • Em processo de indexaçãoCitado por Google
  • Não possue artigos similaresSimilares em SciELO
  • Em processo de indexaçãoSimilares em Google

Compartilhar


DYNA

versão impressa ISSN 0012-7353

Resumo

REALPE, Jhon Jairo; BOLANOS-PANTOJA, Gilberto  e  FLOREZ, Juan Fernando. Design and implementation of a photolithography system to fabricate microdevices from thin films. Dyna rev.fac.nac.minas [online]. 2018, vol.85, n.205, pp.294-301. ISSN 0012-7353.  http://dx.doi.org/10.15446/dyna.v85n205.68837.

This article presents the design and implementation of a photolithography system to manufacture microdevices based on thin films. The system works with ultraviolet (UV) source of 380nm and allows to obtain 10-200 μm microstructures. The implementation was made with the product design and development process, where the technical specifications, generation, selection and proof of concepts of the system equipment modules were determined. A spincoater with an operating range of 500-6000 rpm and UV radiation source, based on LEDs, with ranges in power of 1-20mW/cm2 and time of exposure 1-60s, were implemented. With optical microscopy and digital image processing, it was determined that the percentage relative error in their areas is less than 4% and the variability in their widths is less than two times the standard deviation.

Palavras-chave : product design; photolithography; microdevice; thin films.

        · resumo em Espanhol     · texto em Espanhol     · Espanhol ( pdf )