Abstract

CAMARGO SUAREZ, Victor Hugo; ACOSTA MAYA, Diego Andrés  and  JARAMILLO O, Juan Manuel. Conceptual design of a Langmüir probe for cold plasma characterization employing statistical design of experiments. Rev.fac.ing.univ. Antioquia [online]. 2013, n.67, pp.76-88. ISSN 0120-6230.

The characterization and control of plasma-assisted processes, has become increasingly urgent to adapt this kind technology to industrial contexts. This work presents the design and construction of a cold plasma characterization system by eleEctrostatic means (Langmuir probe), based on concepts of plasma physics and tools of engineering, design of experiments and conceptual design. The result of this work is a functional prototype probe and some measurements on the reactor.

Keywords : Plasma; Langmuir probe; conceptual design; design of experiments; plasma physics.

        · abstract in Spanish     · text in Spanish     · Spanish ( pdf )