Resumo

DUQUE, Jhoan S; OROZCO, Stefania  e  RIASCOS, Henry. ZnMnO FILMS GROWN BY PLD: EFFECT OF Mn CONCENTRATION. Momento [online]. 2015, n.51, pp.95-103. ISSN 0121-4470.

Abstract ZnO thin films were deposited by the method of pulsed laser deposition (PLD, for its acronym in English) on silicon substrates, varying the concentration of Mn in the range of 1 to 20 wt.%. The gas pressure work and substrate temperature were keeping constant, at 46 mTorr and room temperature respectively. In order to observe the effect of the Mn concentration in the grown samples, X-ray diffraction (XRD) and Raman spectroscopy techniques were used. The XRD study shows that all samples prepared in this work have a hexagonal wurtzite structure with slight variation of the lattice parameters between 3.170 Å to 3.192 Å and 5.176 Å to 5.213 Å for the constants a and c respectively. All the samples diplay the optical mode E2 (High) typical of the structure of ZnO, which supports the existence of the wurtzite structure. Generally bands located at 100 cm^-1, 434 cm^-1 and 570 cm^-1 associated with the vibration modes E₂ (Low), E₂ (High) and E₁ (LO) were observed respectively. There is no chance of phase relative to ZnO due to the incorporation of Mn as determined from structural study of samples.

Palavras-chave : Thin Films; Pulsed Laser Deposition; ZnMnO; X-Ray Diffraction; Raman Spectroscopy.

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