Resumo

ADAMES, R. P; SEGURA, J. A; GOMEZ, D.P  e  ARDILA, A. M. Fabrication and Characterization of Alq₃ Thin Films. ing.cienc. [online]. 2014, vol.10, n.20, pp.37-50. ISSN 1794-9165.

Alq₃ (tris (8-hydroxyquinolate) aluminum) thin films were deposited on glass by thermal evaporation in order to establish the optimal evaporation rates of thin films deposited between 30 to 120nm on a substrate with temperatures between 60 and 120°C. The thin films were characterized by SEM microscopy and perfilometry to compare the obtained thickness in-situ by quartz crystals; furthermore photoluminescence measures were made.

Palavras-chave : thin film; thermal evaporation; substrate; characterization; organic semiconductor.

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