Abstract

ARIAS, D. F; PEREZ, D  and  GONZALEZ, J.M. A review of the state of the art when measuring the nanohardness using the Atomic Force Microscope. Entre Ciencia e Ingenieria [online]. 2015, vol.9, n.18, pp.67-74. ISSN 1909-8367.

Abstract In nanotechnology, one of the powerful tools is the atomic force microscope (AFM). Instrument used to characterize materials superficially. Nanoscale hardness (nanohardness) using nanoindentation method spectroscopy mode is considered when evaluating these characteristics. The suitable equipment to measure the hardness in materials such as thin films, with thicknesses on the order of tens of nanometers is the AFM. In this article, the authors propose a first approach to some models used to evaluate the hardness, using the AFM, based on the elastic model.

Keywords : nanohadness; atomic force microscopy; Oliver Pharr model; spectroscopy of forces.

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