<?xml version="1.0" encoding="ISO-8859-1"?><article xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<front>
<journal-meta>
<journal-id>0370-3908</journal-id>
<journal-title><![CDATA[Revista de la Academia Colombiana de Ciencias Exactas, Físicas y Naturales]]></journal-title>
<abbrev-journal-title><![CDATA[Rev. acad. colomb. cienc. exact. fis. nat.]]></abbrev-journal-title>
<issn>0370-3908</issn>
<publisher>
<publisher-name><![CDATA[Academia Colombiana de Ciencias Exactas, Físicas y Naturales]]></publisher-name>
</publisher>
</journal-meta>
<article-meta>
<article-id>S0370-39082021000200570</article-id>
<article-id pub-id-type="doi">10.18257/raccefyn.1198</article-id>
<title-group>
<article-title xml:lang="en"><![CDATA[Synthesis of nanostructured (Ti-Zr-Si)N coatings deposited on Ti6A14V alloy]]></article-title>
<article-title xml:lang="es"><![CDATA[Síntesis de recubrimientos nanoestructurados de (Ti-Zr-Si)N depositados sobre aleación de Ti6A14V]]></article-title>
</title-group>
<contrib-group>
<contrib contrib-type="author">
<name>
<surname><![CDATA[CárdenasFlechas]]></surname>
<given-names><![CDATA[Leydi Julieta]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Mejía-Villagrán]]></surname>
<given-names><![CDATA[Claudia Patricia]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
<xref ref-type="aff" rid="Aaf"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Rincon-Joya]]></surname>
<given-names><![CDATA[Miryam]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
<contrib contrib-type="author">
<name>
<surname><![CDATA[Olaya-Florez]]></surname>
<given-names><![CDATA[Jhon Jairo]]></given-names>
</name>
<xref ref-type="aff" rid="Aff"/>
</contrib>
</contrib-group>
<aff id="Af1">
<institution><![CDATA[,Universidad Nacional de Colombia Departamento de Ingeniería Mecánica y Mecatrónica ]]></institution>
<addr-line><![CDATA[Bogotá ]]></addr-line>
<country>Colombia</country>
</aff>
<aff id="Af2">
<institution><![CDATA[,Fundación Universitaria Monserrate Escuela de Ingenierías y Tecnologías ]]></institution>
<addr-line><![CDATA[Bogotá ]]></addr-line>
<country>Colombia</country>
</aff>
<aff id="Af3">
<institution><![CDATA[,Universidad Nacional de Colombia Facultad de Ciencias Departamento de Física]]></institution>
<addr-line><![CDATA[Bogotá ]]></addr-line>
<country>Colombia</country>
</aff>
<pub-date pub-type="pub">
<day>00</day>
<month>06</month>
<year>2021</year>
</pub-date>
<pub-date pub-type="epub">
<day>00</day>
<month>06</month>
<year>2021</year>
</pub-date>
<volume>45</volume>
<numero>175</numero>
<fpage>570</fpage>
<lpage>581</lpage>
<copyright-statement/>
<copyright-year/>
<self-uri xlink:href="http://www.scielo.org.co/scielo.php?script=sci_arttext&amp;pid=S0370-39082021000200570&amp;lng=en&amp;nrm=iso"></self-uri><self-uri xlink:href="http://www.scielo.org.co/scielo.php?script=sci_abstract&amp;pid=S0370-39082021000200570&amp;lng=en&amp;nrm=iso"></self-uri><self-uri xlink:href="http://www.scielo.org.co/scielo.php?script=sci_pdf&amp;pid=S0370-39082021000200570&amp;lng=en&amp;nrm=iso"></self-uri><abstract abstract-type="short" xml:lang="en"><p><![CDATA[Abstract TiZrSiN coatings have important applications as corrosion barriers and thermal stabilizers. The addition of Si in TiZrN films helps increase hardness and thermal stability of the base coat. In this work thin films of (Ti-Zr-Si)N were deposited on the Ti6Al4V alloy by the co-sputtering technique and using Ti5Si2 and Zr targets. The synthesis of the coatings was carried out by varying the discharge power in the Ti5 well as a variation in the deposit temperature at room temperature 130° and 260°C. The coatings were characterized by means of X-ray diffraction (XRD), evidencing the formation of the phase that belongs to the solid solution (Zr, Ti)N, scanning electron microscopy (SEM), UV-Vis spectroscopy and hardness and pin-on-disc tests. The thickness was measured through interferometry with values between 662 and 481nm for the deposited coatings. According to the failure mechanism in the scratch test, the best results were obtained with a power of 170W and 260°C with a cohesive failure Lc1 = 2.1N and an adhesive failure Lc2 = 4.7N.]]></p></abstract>
<abstract abstract-type="short" xml:lang="es"><p><![CDATA[Resumen Los recubrimientos de TiZrSiN tienen aplicaciones importantes como barreras contra la corrosión y estabilizadores térmicos. La adición de Si en las películas de TiZrN ayuda a aumentar la dureza y la estabilidad térmica del recubrimiento base. En este trabajo, películas delgadas de (Ti-Zr-Si)N fueron depositadas sobre la aleación de Ti6Al4V mediante la técnica de co-sputtering utilizando blancos de Ti5Si2 y Zr. La síntesis de los recubrimientos se realizó variando la potencia de descarga en la fuente RF encargada del blanco de Ti5Si2 a 130W, 150W y 170W, así como una variación en la temperatura de depósito a temperatura ambiente, 130° y 260°C. Los recubrimientos fueron caracterizados por medio de difracción de rayos X (XRD), donde se evidencia la formación de la fase que pertenece a la solución sólida (Zr,Ti)N, microscopía electrónica de barrido (SEM), espectroscopia UV-Vis y ensayos de dureza y pin-on-disc. El espesor fue medido a través de interferometría con valores entre 662 y 481nm para los recubrimientos depositados. De acuerdo con el mecanismo de falla en el ensayo de rayado, los mejores resultados obtenidos se dieron para una potencia de 170W y 260°C con una falla cohesiva L c1=2.1N y una falla adhesiva L c2=4.7N.]]></p></abstract>
<kwd-group>
<kwd lng="en"><![CDATA[(Ti-Zr-Si)N]]></kwd>
<kwd lng="en"><![CDATA[Ti6Al4V]]></kwd>
<kwd lng="en"><![CDATA[Coatings]]></kwd>
<kwd lng="en"><![CDATA[Co-sputtering]]></kwd>
<kwd lng="en"><![CDATA[Nanostructures]]></kwd>
<kwd lng="es"><![CDATA[(Ti-Zr-Si)N]]></kwd>
<kwd lng="es"><![CDATA[Ti6Al4V]]></kwd>
<kwd lng="es"><![CDATA[Recubrimientos]]></kwd>
<kwd lng="es"><![CDATA[Co-sputtering]]></kwd>
<kwd lng="es"><![CDATA[Nanoestructuras]]></kwd>
</kwd-group>
</article-meta>
</front><back>
<ref-list>
<ref id="B1">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Abadias]]></surname>
<given-names><![CDATA[G.]]></given-names>
</name>
<name>
<surname><![CDATA[Daniliuk]]></surname>
<given-names><![CDATA[A. Y.]]></given-names>
</name>
<name>
<surname><![CDATA[Solodukhin]]></surname>
<given-names><![CDATA[I A.]]></given-names>
</name>
<name>
<surname><![CDATA[Uglov]]></surname>
<given-names><![CDATA[V. V.]]></given-names>
</name>
<name>
<surname><![CDATA[Zlotsky]]></surname>
<given-names><![CDATA[S. V]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Thermal stability of TiZrAlN and TiZrSiN films formed by reactive magnetron sputtering]]></article-title>
<source><![CDATA[Inorganic Materials: Applied Research]]></source>
<year>2018</year>
<volume>9</volume>
<numero>3</numero>
<issue>3</issue>
<page-range>418-26</page-range></nlm-citation>
</ref>
<ref id="B2">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Abadias]]></surname>
<given-names><![CDATA[G.]]></given-names>
</name>
<name>
<surname><![CDATA[Koutsokeras]]></surname>
<given-names><![CDATA[L. E.]]></given-names>
</name>
<name>
<surname><![CDATA[Dub]]></surname>
<given-names><![CDATA[S. N.]]></given-names>
</name>
<name>
<surname><![CDATA[Tolmachova]]></surname>
<given-names><![CDATA[G. N.]]></given-names>
</name>
<name>
<surname><![CDATA[Debelle]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Sauvage]]></surname>
<given-names><![CDATA[T.]]></given-names>
</name>
<name>
<surname><![CDATA[Villechaise]]></surname>
<given-names><![CDATA[P]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti-Zr-N and Ti-Ta-N]]></article-title>
<source><![CDATA[Journal of Vacuum Science &amp; Technology A: Vacuum, Surfaces, and Films]]></source>
<year>2010</year>
<volume>28</volume>
<numero>4</numero>
<issue>4</issue>
<page-range>541-51</page-range></nlm-citation>
</ref>
<ref id="B3">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Abrikosov]]></surname>
<given-names><![CDATA[I. A.]]></given-names>
</name>
<name>
<surname><![CDATA[Knutsson]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Alling]]></surname>
<given-names><![CDATA[B.]]></given-names>
</name>
<name>
<surname><![CDATA[Tasnadi]]></surname>
<given-names><![CDATA[F.]]></given-names>
</name>
<name>
<surname><![CDATA[Lind]]></surname>
<given-names><![CDATA[H.]]></given-names>
</name>
<name>
<surname><![CDATA[Hultman]]></surname>
<given-names><![CDATA[L.]]></given-names>
</name>
<name>
<surname><![CDATA[Oden]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Phase stability and elasticity of TiAlN]]></article-title>
<source><![CDATA[Materials]]></source>
<year>2011</year>
<volume>4</volume>
<numero>9</numero>
<issue>9</issue>
<page-range>1599-618</page-range></nlm-citation>
</ref>
<ref id="B4">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Attari]]></surname>
<given-names><![CDATA[V.]]></given-names>
</name>
<name>
<surname><![CDATA[Cruzado]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Arroyave]]></surname>
<given-names><![CDATA[R]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Exploration of the microstructure space in TiAlZrN ultra-hard nanostructured coatings]]></article-title>
<source><![CDATA[Acta Materialia]]></source>
<year>2019</year>
</nlm-citation>
</ref>
<ref id="B5">
<nlm-citation citation-type="book">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Baturina]]></surname>
<given-names><![CDATA[O. A.]]></given-names>
</name>
<name>
<surname><![CDATA[Epshteyn]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Purdy]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Simpkins]]></surname>
<given-names><![CDATA[B.]]></given-names>
</name>
<name>
<surname><![CDATA[Forcherio]]></surname>
<given-names><![CDATA[G. T.]]></given-names>
</name>
<name>
<surname><![CDATA[Govorov]]></surname>
<given-names><![CDATA[A. O]]></given-names>
</name>
</person-group>
<source><![CDATA[Comparison of Photocatalytic Activities of TiN and Zrn Nanoparticles Incorporated into TiO2 matrix Under Visible Excitation. In Meeting Abstracts (No. 45, pp. 2072-2072)]]></source>
<year>2019</year>
<publisher-name><![CDATA[The Electrochemical Society]]></publisher-name>
</nlm-citation>
</ref>
<ref id="B6">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Bendavid]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Martin]]></surname>
<given-names><![CDATA[P. J.]]></given-names>
</name>
<name>
<surname><![CDATA[Kinder]]></surname>
<given-names><![CDATA[T. J.]]></given-names>
</name>
<name>
<surname><![CDATA[Preston]]></surname>
<given-names><![CDATA[E. W]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Properties of Til-xSixNy films deposited by concurrent cathodic arc evaporation and magnetron sputtering]]></article-title>
<source><![CDATA[Surf. Coat. Technol]]></source>
<year>2003</year>
<numero>163-164</numero>
<issue>163-164</issue>
</nlm-citation>
</ref>
<ref id="B7">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Bisbal]]></surname>
<given-names><![CDATA[R.]]></given-names>
</name>
<name>
<surname><![CDATA[Dávila]]></surname>
<given-names><![CDATA[P.]]></given-names>
</name>
<name>
<surname><![CDATA[Gomez]]></surname>
<given-names><![CDATA[F.]]></given-names>
</name>
<name>
<surname><![CDATA[Camero]]></surname>
<given-names><![CDATA[S.]]></given-names>
</name>
<name>
<surname><![CDATA[Pérez]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
<name>
<surname><![CDATA[González]]></surname>
<given-names><![CDATA[G]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Efecto del Ta en la aleación Ti-6Al-4V tratada térmicamente]]></article-title>
<source><![CDATA[Revista de la Facultad de Ingeniería Universidad Central de Venezuela]]></source>
<year>2012</year>
<volume>27</volume>
<numero>4</numero>
<issue>4</issue>
<page-range>83-94</page-range></nlm-citation>
</ref>
<ref id="B8">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Cardenas Flechas]]></surname>
<given-names><![CDATA[L. J]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Resistencia a la corrosión de recubrimientos nanoestructurados de Ti-Zr-Si-N]]></article-title>
<source><![CDATA[Ingeniería Mecánica]]></source>
<year>2018</year>
<publisher-name><![CDATA[Universidad Nacional de Colombia]]></publisher-name>
</nlm-citation>
</ref>
<ref id="B9">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Cardenas]]></surname>
<given-names><![CDATA[J.]]></given-names>
</name>
<name>
<surname><![CDATA[Leon]]></surname>
<given-names><![CDATA[J.]]></given-names>
</name>
<name>
<surname><![CDATA[Olaya]]></surname>
<given-names><![CDATA[J. J]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Synthesis and high-temperature corrosion resistance of Ti-Zr-Si-N coatings deposited by means of sputtering]]></article-title>
<source><![CDATA[Corrosion Engineering, Science and Technology]]></source>
<year>2019</year>
<volume>54</volume>
<numero>3</numero>
<issue>3</issue>
<page-range>233-40</page-range></nlm-citation>
</ref>
<ref id="B10">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Cardenas]]></surname>
<given-names><![CDATA[L. J. C.]]></given-names>
</name>
<name>
<surname><![CDATA[Barahona]]></surname>
<given-names><![CDATA[E. T.]]></given-names>
</name>
<name>
<surname><![CDATA[Salamanca]]></surname>
<given-names><![CDATA[M. L. P.]]></given-names>
</name>
<name>
<surname><![CDATA[Medina]]></surname>
<given-names><![CDATA[J. X. L.]]></given-names>
</name>
<name>
<surname><![CDATA[Florez]]></surname>
<given-names><![CDATA[J. J. O]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Evaluación de la resistencia a la oxidación de peliculas de Ti-Zr-Si-N producidas por cosputtering]]></article-title>
<source><![CDATA[Bistua Revista de la facultad de ciencias básicas]]></source>
<year>2018</year>
<volume>15</volume>
<numero>2</numero>
<issue>2</issue>
</nlm-citation>
</ref>
<ref id="B11">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Cardenas]]></surname>
<given-names><![CDATA[L.]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Effect of Calcination Temperature on the Behavior of the Agglomerated Co3O4 Nanoparticles Obtained Through the Sol-Gel Method]]></article-title>
<person-group person-group-type="editor">
<name>
<surname><![CDATA[Raba]]></surname>
<given-names><![CDATA[A. M.]]></given-names>
</name>
<name>
<surname><![CDATA[Barba-Ortega]]></surname>
<given-names><![CDATA[J.]]></given-names>
</name>
<name>
<surname><![CDATA[Moreno]]></surname>
<given-names><![CDATA[L. C.]]></given-names>
</name>
<name>
<surname><![CDATA[Joya]]></surname>
<given-names><![CDATA[M. R]]></given-names>
</name>
</person-group>
<source><![CDATA[Journal of Inorganic and Organometallic Polymers and Materials]]></source>
<year>2021</year>
<volume>31</volume>
<numero>1</numero>
<issue>1</issue>
<page-range>121-8</page-range></nlm-citation>
</ref>
<ref id="B12">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Cardenas-Flechas]]></surname>
<given-names><![CDATA[L. J.]]></given-names>
</name>
<name>
<surname><![CDATA[Raba]]></surname>
<given-names><![CDATA[A. M.]]></given-names>
</name>
<name>
<surname><![CDATA[Rincón-Joya]]></surname>
<given-names><![CDATA[M]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Synthesis and evaluation of nickel doped Co3O4 produced through hydrothermal technique]]></article-title>
<source><![CDATA[Dyna]]></source>
<year>2020</year>
<volume>87</volume>
<numero>213</numero>
<issue>213</issue>
<page-range>184-91</page-range></nlm-citation>
</ref>
<ref id="B13">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Ding]]></surname>
<given-names><![CDATA[X. Z.]]></given-names>
</name>
<name>
<surname><![CDATA[Tan]]></surname>
<given-names><![CDATA[A. L. K.]]></given-names>
</name>
<name>
<surname><![CDATA[Zeng]]></surname>
<given-names><![CDATA[X. T.]]></given-names>
</name>
<name>
<surname><![CDATA[Wang]]></surname>
<given-names><![CDATA[C.]]></given-names>
</name>
<name>
<surname><![CDATA[Yue]]></surname>
<given-names><![CDATA[T.]]></given-names>
</name>
<name>
<surname><![CDATA[Sun]]></surname>
<given-names><![CDATA[C. Q]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Corrosion resistance of CrAlN and TiAlN coatings deposited by lateral rotating cathode arc]]></article-title>
<source><![CDATA[Thin Solid Films]]></source>
<year>2008</year>
<volume>516</volume>
<numero>16</numero>
<issue>16</issue>
<page-range>5716-20</page-range></nlm-citation>
</ref>
<ref id="B14">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Escobar]]></surname>
<given-names><![CDATA[D.]]></given-names>
</name>
<name>
<surname><![CDATA[Ospina]]></surname>
<given-names><![CDATA[R.]]></given-names>
</name>
<name>
<surname><![CDATA[Gómez]]></surname>
<given-names><![CDATA[A. G.]]></given-names>
</name>
<name>
<surname><![CDATA[Restrepo-Parra]]></surname>
<given-names><![CDATA[E]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Microstructure, residual stress and hardness study of nanocrystalline titanium-zirconium nitride thin films]]></article-title>
<source><![CDATA[Ceramics International]]></source>
<year>2015</year>
<volume>41</volume>
<numero>1</numero>
<issue>1</issue>
<page-range>947-52</page-range></nlm-citation>
</ref>
<ref id="B15">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Georgson]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
<name>
<surname><![CDATA[Roos]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Ribbing]]></surname>
<given-names><![CDATA[C. G]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[The influence of preparation conditions on the optical properties of titanium nitride based solar control films]]></article-title>
<source><![CDATA[Journal of Vacuum Science &amp; Technology A: Vacuum, Surfaces, and Films]]></source>
<year>1991</year>
<volume>9</volume>
<numero>4</numero>
<issue>4</issue>
<page-range>2191-5</page-range></nlm-citation>
</ref>
<ref id="B16">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Guler]]></surname>
<given-names><![CDATA[U.]]></given-names>
</name>
<name>
<surname><![CDATA[Boltasseva]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Shalaev]]></surname>
<given-names><![CDATA[V. M]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Refractory plasmonics]]></article-title>
<source><![CDATA[Science]]></source>
<year>2014</year>
<volume>344</volume>
<numero>6181</numero>
<issue>6181</issue>
<page-range>263-4</page-range></nlm-citation>
</ref>
<ref id="B17">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Huang]]></surname>
<given-names><![CDATA[J. H.]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Effect of nitrogen flow rate on the structure and mechanical properties of ZrN thin films on Si (1 0 0) and stainless steel substrates]]></article-title>
<person-group person-group-type="editor">
<name>
<surname><![CDATA[Ho]]></surname>
<given-names><![CDATA[C. H]]></given-names>
</name>
<name>
<surname><![CDATA[Yu]]></surname>
<given-names><![CDATA[G. P]]></given-names>
</name>
</person-group>
<source><![CDATA[Materials chemistry and physics]]></source>
<year>2007</year>
<volume>102</volume>
<numero>1</numero>
<issue>1</issue>
<page-range>31-8</page-range></nlm-citation>
</ref>
<ref id="B18">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Kameneva]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Kichigin]]></surname>
<given-names><![CDATA[V]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Corrosion, wear, and friction behavior of a number of multilayer two-, three-and multicomponent nitride coatings on different substrates, depending on the phase and elemental composition gradient]]></article-title>
<source><![CDATA[Applied Surface Science]]></source>
<year>2019</year>
</nlm-citation>
</ref>
<ref id="B19">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Kiryukhantsev-Korneev]]></surname>
<given-names><![CDATA[F. V.]]></given-names>
</name>
<name>
<surname><![CDATA[Shirmanov]]></surname>
<given-names><![CDATA[N. A.]]></given-names>
</name>
<name>
<surname><![CDATA[Sheveiko]]></surname>
<given-names><![CDATA[A. N.]]></given-names>
</name>
<name>
<surname><![CDATA[Levashov]]></surname>
<given-names><![CDATA[E. A.]]></given-names>
</name>
<name>
<surname><![CDATA[Petrzhik]]></surname>
<given-names><![CDATA[M. I.]]></given-names>
</name>
<name>
<surname><![CDATA[Shtanskii]]></surname>
<given-names><![CDATA[D. V]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Nanostructural wear-resistant coatings produced on metal-cutting tools by electric-arc evaporation and magnetronic sputtering]]></article-title>
<source><![CDATA[Russian Engineering Research]]></source>
<year>2010</year>
<volume>30</volume>
<numero>9</numero>
<issue>9</issue>
<page-range>910-20</page-range></nlm-citation>
</ref>
<ref id="B20">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Klamchuen]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Suzuki]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
<name>
<surname><![CDATA[Nagashima]]></surname>
<given-names><![CDATA[K.]]></given-names>
</name>
<name>
<surname><![CDATA[Yoshida]]></surname>
<given-names><![CDATA[H.]]></given-names>
</name>
<name>
<surname><![CDATA[Kanai]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
<name>
<surname><![CDATA[Zhuge]]></surname>
<given-names><![CDATA[F.]]></given-names>
</name>
<name>
<surname><![CDATA[Kawai]]></surname>
<given-names><![CDATA[T]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Rational concept for designing vapor-liquid-solid growth of single crystalline metal oxide nanowires]]></article-title>
<source><![CDATA[Nano letters]]></source>
<year>2015</year>
<volume>15</volume>
<numero>10</numero>
<issue>10</issue>
<page-range>6406-12</page-range></nlm-citation>
</ref>
<ref id="B21">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Köpf]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Keckes]]></surname>
<given-names><![CDATA[J.]]></given-names>
</name>
<name>
<surname><![CDATA[Todt]]></surname>
<given-names><![CDATA[J.]]></given-names>
</name>
<name>
<surname><![CDATA[Pitonak]]></surname>
<given-names><![CDATA[R.]]></given-names>
</name>
<name>
<surname><![CDATA[Weissenbacher]]></surname>
<given-names><![CDATA[R]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Nanostructured coatings for tooling applications]]></article-title>
<source><![CDATA[International Journal of Refractory Metals and Hard Materials]]></source>
<year>2017</year>
<numero>62</numero>
<issue>62</issue>
<page-range>219-24</page-range></nlm-citation>
</ref>
<ref id="B22">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Lawal]]></surname>
<given-names><![CDATA[J.]]></given-names>
</name>
<name>
<surname><![CDATA[Kiryukhantsev-Korneev]]></surname>
<given-names><![CDATA[P.]]></given-names>
</name>
<name>
<surname><![CDATA[Matthews]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Leyland]]></surname>
<given-names><![CDATA[A]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Mechanical properties and abrasive wear behaviour of Al-based PVD amorphous/nanostructured coatings]]></article-title>
<source><![CDATA[Surface and Coatings Technology]]></source>
<year>2017</year>
<numero>310</numero>
<issue>310</issue>
<page-range>59-69</page-range></nlm-citation>
</ref>
<ref id="B23">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Lin]]></surname>
<given-names><![CDATA[Y. W.]]></given-names>
</name>
<name>
<surname><![CDATA[Huang]]></surname>
<given-names><![CDATA[J. H.]]></given-names>
</name>
<name>
<surname><![CDATA[Yu]]></surname>
<given-names><![CDATA[G. P.]]></given-names>
</name>
<name>
<surname><![CDATA[Hsiao]]></surname>
<given-names><![CDATA[C. N.]]></given-names>
</name>
<name>
<surname><![CDATA[Chen]]></surname>
<given-names><![CDATA[F. Z]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Influence of ion bombardment on structure and properties of TiZrN thin film]]></article-title>
<source><![CDATA[Applied Surface Science]]></source>
<year>2015</year>
<numero>354</numero>
<issue>354</issue>
<page-range>155-60</page-range></nlm-citation>
</ref>
<ref id="B24">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Ma]]></surname>
<given-names><![CDATA[S. L.]]></given-names>
</name>
<name>
<surname><![CDATA[Ma]]></surname>
<given-names><![CDATA[D. Y.]]></given-names>
</name>
<name>
<surname><![CDATA[Guo]]></surname>
<given-names><![CDATA[Y.]]></given-names>
</name>
<name>
<surname><![CDATA[Xu]]></surname>
<given-names><![CDATA[B.]]></given-names>
</name>
<name>
<surname><![CDATA[Wu]]></surname>
<given-names><![CDATA[G. Z.]]></given-names>
</name>
<name>
<surname><![CDATA[Xu]]></surname>
<given-names><![CDATA[K. W.]]></given-names>
</name>
<name>
<surname><![CDATA[Chu]]></surname>
<given-names><![CDATA[P. K]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Synthesis and characterization of super hard, self-lubricating Ti-Si-C-N nanocomposite coatings]]></article-title>
<source><![CDATA[Acta Materialia]]></source>
<year>2007</year>
<volume>55</volume>
<numero>18</numero>
<issue>18</issue>
<page-range>6350-5</page-range></nlm-citation>
</ref>
<ref id="B25">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Macias]]></surname>
<given-names><![CDATA[H. A.]]></given-names>
</name>
<name>
<surname><![CDATA[Yate]]></surname>
<given-names><![CDATA[L.]]></given-names>
</name>
<name>
<surname><![CDATA[Coy]]></surname>
<given-names><![CDATA[L. E.]]></given-names>
</name>
<name>
<surname><![CDATA[Aperador]]></surname>
<given-names><![CDATA[W.]]></given-names>
</name>
<name>
<surname><![CDATA[Olaya]]></surname>
<given-names><![CDATA[J. J]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Influence of Si-addition on wear and oxidation resistance of TiWSixN thin films]]></article-title>
<source><![CDATA[Ceramics International]]></source>
<year>2019</year>
<volume>45</volume>
<numero>14</numero>
<issue>14</issue>
<page-range>17363-75</page-range></nlm-citation>
</ref>
<ref id="B26">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Mikula]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
<name>
<surname><![CDATA[Roch]]></surname>
<given-names><![CDATA[T.]]></given-names>
</name>
<name>
<surname><![CDATA[Plasienka]]></surname>
<given-names><![CDATA[D.]]></given-names>
</name>
<name>
<surname><![CDATA[Satrapinskyy]]></surname>
<given-names><![CDATA[L.]]></given-names>
</name>
<name>
<surname><![CDATA[Svec Sr]]></surname>
<given-names><![CDATA[P.]]></given-names>
</name>
<name>
<surname><![CDATA[Vlcková]]></surname>
<given-names><![CDATA[D.]]></given-names>
</name>
<name>
<surname><![CDATA[Kús]]></surname>
<given-names><![CDATA[P]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Thermal stability and structural evolution of quaternary Ti-Ta-B-N coatings]]></article-title>
<source><![CDATA[Surface and Coatings Technology]]></source>
<year>2014</year>
<numero>259</numero>
<issue>259</issue>
<page-range>698-706</page-range></nlm-citation>
</ref>
<ref id="B27">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Miletic]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Panjan]]></surname>
<given-names><![CDATA[P.]]></given-names>
</name>
<name>
<surname><![CDATA[Skoric]]></surname>
<given-names><![CDATA[B.]]></given-names>
</name>
<name>
<surname><![CDATA[Cekada]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
<name>
<surname><![CDATA[Drazic]]></surname>
<given-names><![CDATA[G.]]></given-names>
</name>
<name>
<surname><![CDATA[Kovac]]></surname>
<given-names><![CDATA[J]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Microstructure and mechanical properties of nanostructured Ti-Al-Si-N coatings deposited by magnetron sputtering]]></article-title>
<source><![CDATA[Surface and Coatings Technology]]></source>
<year>2014</year>
<numero>241</numero>
<issue>241</issue>
<page-range>105-11</page-range></nlm-citation>
</ref>
<ref id="B28">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Moshtaghioun]]></surname>
<given-names><![CDATA[B. M.]]></given-names>
</name>
<name>
<surname><![CDATA[Gómez-García]]></surname>
<given-names><![CDATA[D.]]></given-names>
</name>
<name>
<surname><![CDATA[Domínguez-Rodríguez]]></surname>
<given-names><![CDATA[A]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Spark plasma sintering of titanium nitride in nitrogen: Does it affect the sinterability and the mechanical properties]]></article-title>
<source><![CDATA[Journal of the European Ceramic Society]]></source>
<year>2018</year>
<volume>38</volume>
<numero>4</numero>
<issue>4</issue>
<page-range>1190-6</page-range></nlm-citation>
</ref>
<ref id="B29">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Nakayama]]></surname>
<given-names><![CDATA[H.]]></given-names>
</name>
<name>
<surname><![CDATA[Ozaki]]></surname>
<given-names><![CDATA[K]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Effect of mechanical milling of elemental powders on interface formation in TiN-Ni cermets prepared by pulsed current sintering]]></article-title>
<source><![CDATA[International Journal of Refractory Metals and Hard Materials]]></source>
<year>2015</year>
<volume>51</volume>
<page-range>309-14</page-range></nlm-citation>
</ref>
<ref id="B30">
<nlm-citation citation-type="book">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Olaya]]></surname>
<given-names><![CDATA[J. J.]]></given-names>
</name>
<name>
<surname><![CDATA[Capote]]></surname>
<given-names><![CDATA[G]]></given-names>
</name>
<name>
<surname><![CDATA[Marulanda]]></surname>
</name>
</person-group>
<source><![CDATA[Producción, caracterización y aplicaciones de recubrimientos producidos por plasma]]></source>
<year>2015</year>
<edition>1</edition>
<publisher-name><![CDATA[Universidad Nacional de Colombia]]></publisher-name>
</nlm-citation>
</ref>
<ref id="B31">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Parra]]></surname>
<given-names><![CDATA[JP]]></given-names>
</name>
<name>
<surname><![CDATA[Piamba]]></surname>
<given-names><![CDATA[OE]]></given-names>
</name>
<name>
<surname><![CDATA[Olaya]]></surname>
<given-names><![CDATA[JJ]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Resistencia a la corrosión a alta temperatura en películas delgadas de Bix Tiy Oz producidas por sputtering R. F]]></article-title>
<source><![CDATA[Revista Latinoamericana de Metalurgia y Materiales]]></source>
<year>2015</year>
<numero>36</numero>
<issue>36</issue>
<page-range>2-8</page-range></nlm-citation>
</ref>
<ref id="B32">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Phaengam]]></surname>
<given-names><![CDATA[W.]]></given-names>
</name>
<name>
<surname><![CDATA[Horprathum]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
<name>
<surname><![CDATA[Chananonnawathorn]]></surname>
<given-names><![CDATA[C.]]></given-names>
</name>
<name>
<surname><![CDATA[Lertvanithphol]]></surname>
<given-names><![CDATA[T.]]></given-names>
</name>
<name>
<surname><![CDATA[Samransuksamer]]></surname>
<given-names><![CDATA[B.]]></given-names>
</name>
<name>
<surname><![CDATA[Songsiriritthigul]]></surname>
<given-names><![CDATA[P.]]></given-names>
</name>
<name>
<surname><![CDATA[Chaiyakun]]></surname>
<given-names><![CDATA[S]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Oblique angle deposition of nanocolum-nar TiZrN films via reactive magnetron co-sputtering technique: The influence of the Zr target powers]]></article-title>
<source><![CDATA[Current Applied Physics]]></source>
<year>2019</year>
<volume>19</volume>
<numero>8</numero>
<issue>8</issue>
<page-range>894-901</page-range></nlm-citation>
</ref>
<ref id="B33">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Pogrebnjak]]></surname>
<given-names><![CDATA[A. D.]]></given-names>
</name>
<name>
<surname><![CDATA[Shpak]]></surname>
<given-names><![CDATA[A. P.]]></given-names>
</name>
<name>
<surname><![CDATA[Beresnev]]></surname>
<given-names><![CDATA[V. M.]]></given-names>
</name>
<name>
<surname><![CDATA[Kolesnikov]]></surname>
<given-names><![CDATA[D. A.]]></given-names>
</name>
<name>
<surname><![CDATA[Kunitskii]]></surname>
<given-names><![CDATA[Y. A.]]></given-names>
</name>
<name>
<surname><![CDATA[Sobol]]></surname>
<given-names><![CDATA[O. V.]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Effect of thermal annealing in vacuum and in air on nanograin sizes in hard and superhard coatings Zr-Ti-Si-N]]></article-title>
<person-group person-group-type="editor">
<name>
<surname><![CDATA[Demyanenko]]></surname>
<given-names><![CDATA[A. A.]]></given-names>
</name>
</person-group>
<source><![CDATA[Journal of Nanoscience and Nanotechnology]]></source>
<year>2012</year>
<volume>12</volume>
<numero>12</numero>
<issue>12</issue>
<page-range>9213-9</page-range></nlm-citation>
</ref>
<ref id="B34">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Rizzo]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Signore]]></surname>
<given-names><![CDATA[M. A.]]></given-names>
</name>
<name>
<surname><![CDATA[Penza]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
<name>
<surname><![CDATA[Tagliente]]></surname>
<given-names><![CDATA[M. A.]]></given-names>
</name>
<name>
<surname><![CDATA[De Riccardis]]></surname>
<given-names><![CDATA[F.]]></given-names>
</name>
<name>
<surname><![CDATA[Serra]]></surname>
<given-names><![CDATA[E]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[RF sputtering deposition of alternate TiN/ZrN multilayer hard coatings]]></article-title>
<source><![CDATA[Thin Solid Films]]></source>
<year>2006</year>
<volume>515</volume>
<numero>2</numero>
<issue>2</issue>
<page-range>500-4</page-range></nlm-citation>
</ref>
<ref id="B35">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Romero]]></surname>
<given-names><![CDATA[E. C.]]></given-names>
</name>
<name>
<surname><![CDATA[Osorio]]></surname>
<given-names><![CDATA[J. C.]]></given-names>
</name>
<name>
<surname><![CDATA[Soto]]></surname>
<given-names><![CDATA[R. T.]]></given-names>
</name>
<name>
<surname><![CDATA[Macías]]></surname>
<given-names><![CDATA[A. H.]]></given-names>
</name>
<name>
<surname><![CDATA[Botero]]></surname>
<given-names><![CDATA[M. G]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Microstructure, mechanical and tribological performance of nanostructured TiAlTaN-(TiAlN/TaN) n coatings: Understanding the effect of quaternary/multilayer volume fraction]]></article-title>
<source><![CDATA[Surface and Coatings Technology]]></source>
<year>2019</year>
<numero>377</numero>
<issue>377</issue>
<page-range>124875</page-range></nlm-citation>
</ref>
<ref id="B36">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Saladukhin]]></surname>
<given-names><![CDATA[I A.]]></given-names>
</name>
<name>
<surname><![CDATA[Abadias]]></surname>
<given-names><![CDATA[G.]]></given-names>
</name>
<name>
<surname><![CDATA[Michel]]></surname>
<given-names><![CDATA[A.]]></given-names>
</name>
<name>
<surname><![CDATA[Uglov]]></surname>
<given-names><![CDATA[V. V.]]></given-names>
</name>
<name>
<surname><![CDATA[Zlotski]]></surname>
<given-names><![CDATA[S. V.]]></given-names>
</name>
<name>
<surname><![CDATA[Dub]]></surname>
<given-names><![CDATA[S. N.]]></given-names>
</name>
<name>
<surname><![CDATA[Tolmachova]]></surname>
<given-names><![CDATA[G. N]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Structure and hardness of quaternary TiZrSiN thin films deposited by reactive magnetron co-sputtering]]></article-title>
<source><![CDATA[Thin Solid Films]]></source>
<year>2015</year>
<numero>581</numero>
<issue>581</issue>
<page-range>25-31</page-range></nlm-citation>
</ref>
<ref id="B37">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Pogrebnyak]]></surname>
<given-names><![CDATA[A. D.]]></given-names>
</name>
<name>
<surname><![CDATA[Beresnev]]></surname>
<given-names><![CDATA[V. M]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Effect of the preparation conditions on the phase composition, structure, and mechanical characteristics of vacuum-Arc Zr-Ti-Si-N coatings]]></article-title>
<source><![CDATA[The Physics of Metals and Metallography]]></source>
<year>2011</year>
<volume>112</volume>
<numero>2</numero>
<issue>2</issue>
<page-range>188</page-range></nlm-citation>
</ref>
<ref id="B38">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Uglov]]></surname>
<given-names><![CDATA[V. V.]]></given-names>
</name>
<name>
<surname><![CDATA[Abadias]]></surname>
<given-names><![CDATA[G.]]></given-names>
</name>
<name>
<surname><![CDATA[Zlotski]]></surname>
<given-names><![CDATA[S. V.]]></given-names>
</name>
<name>
<surname><![CDATA[Saladukhin]]></surname>
<given-names><![CDATA[I. A.]]></given-names>
</name>
<name>
<surname><![CDATA[Skuratov]]></surname>
<given-names><![CDATA[V. A.]]></given-names>
</name>
<name>
<surname><![CDATA[Leshkevich]]></surname>
<given-names><![CDATA[S. S.]]></given-names>
</name>
<name>
<surname><![CDATA[Petrovich]]></surname>
<given-names><![CDATA[S]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Thermal stability of nanostructured TiZrSiN thin films subjected to helium ion irradiation]]></article-title>
<source><![CDATA[Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms]]></source>
<year>2015</year>
<numero>354</numero>
<issue>354</issue>
<page-range>264-8</page-range></nlm-citation>
</ref>
<ref id="B39">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Vanegas]]></surname>
<given-names><![CDATA[H. S.]]></given-names>
</name>
<name>
<surname><![CDATA[Alfonso]]></surname>
<given-names><![CDATA[J. E.]]></given-names>
</name>
<name>
<surname><![CDATA[Olaya]]></surname>
<given-names><![CDATA[J. J]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Effect of Si content on functional behavior of nanostructured coatings of Zr-Si-N]]></article-title>
<source><![CDATA[Materials Research Express]]></source>
<year>2019</year>
<volume>6</volume>
<numero>11</numero>
<issue>11</issue>
<page-range>115076</page-range></nlm-citation>
</ref>
<ref id="B40">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Veszelei]]></surname>
<given-names><![CDATA[M.]]></given-names>
</name>
<name>
<surname><![CDATA[Andersson]]></surname>
<given-names><![CDATA[K.]]></given-names>
</name>
<name>
<surname><![CDATA[Ribbing]]></surname>
<given-names><![CDATA[C. G.]]></given-names>
</name>
<name>
<surname><![CDATA[Jarrendahl]]></surname>
<given-names><![CDATA[K.]]></given-names>
</name>
<name>
<surname><![CDATA[Arwin]]></surname>
<given-names><![CDATA[H]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Optical constants and Drude analysis of sputtered zirconium nitride films]]></article-title>
<source><![CDATA[Applied optics]]></source>
<year>1994</year>
<volume>33</volume>
<numero>10</numero>
<issue>10</issue>
<page-range>1993-2001</page-range></nlm-citation>
</ref>
<ref id="B41">
<nlm-citation citation-type="journal">
<person-group person-group-type="author">
<name>
<surname><![CDATA[Yalamanchili]]></surname>
<given-names><![CDATA[K.]]></given-names>
</name>
<name>
<surname><![CDATA[Forsén]]></surname>
<given-names><![CDATA[R.]]></given-names>
</name>
<name>
<surname><![CDATA[Jiménez-Piqué]]></surname>
<given-names><![CDATA[E.]]></given-names>
</name>
<name>
<surname><![CDATA[Joesaar]]></surname>
<given-names><![CDATA[M. J.]]></given-names>
</name>
<name>
<surname><![CDATA[Roa]]></surname>
<given-names><![CDATA[J. J.]]></given-names>
</name>
<name>
<surname><![CDATA[Ghafoor]]></surname>
<given-names><![CDATA[N.]]></given-names>
</name>
<name>
<surname><![CDATA[Odén]]></surname>
<given-names><![CDATA[M]]></given-names>
</name>
</person-group>
<article-title xml:lang=""><![CDATA[Structure, deformation and fracture of arc evaporated Zr Si-N hard films]]></article-title>
<source><![CDATA[Surface and Coatings Technology]]></source>
<year>2014</year>
<numero>258</numero>
<issue>258</issue>
<page-range>1100-7</page-range></nlm-citation>
</ref>
</ref-list>
</back>
</article>
